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日本YAMATO大氣壓等離子清洗機(jī)APPC-400Y

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產(chǎn)品型號(hào)APPC-400Y

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詳細(xì)介紹

日本YAMATO大氣壓等離子清洗機(jī)APPC-400Y :

Plasma apparatus-(Atmosphericpressure plasma cleaner)


APPC-400Y

System Outline
ThisEquipment is Atmosphere Plasma for cleaningsamplesurface.
Easy to make In-Line system with otherEquipment.UnifyandSeparation Type available, Also, Two kindsofElectronics(Insertion and Spout) type available.
Feature
  1. Does not need Vacuum systemsuchasVacuum pump and Vacuum chamber.
  2. Reaction gas use He,Ar andO2mixinggas for cleaning sample surface.

APPC-400Y-2

Sample
Sanplesize : Any size okay(W) x 45(D) x Max. 15(T)mm
Equipment Function

Loading Sample

  1. Useing conveyor or Armchuckforloading sample
  2. Sample are continuanceloadingtoelectrode.
  3. Un-load sample.
  4. Go to next process
  1. Automatic andManualoperationselectable.
  2. Touch panel operation
  3. Two Electrode can build inforheavydirt cleaning of sample surface.
  4. Easy to install and easytomakeIn-Line system.
  5. Electrode and Main unitcanbeseparately. Also, One controller cancontrolTwoElectrode.
ExternalDimension Systemstructure
  1. Unify type : W800 xL700xH1200mm
  2. Separately type : W800 xL700xH950mm
  1. Electrode unit
  2. RF generator unit (Inthecontrolunit)
  3. Gas flow unit (Inthecontrolunit)
  4. Touch panel (On controlunit)
  5. Cooling unit (Option)
  6. Loading andUn-loadingunit(Option)
Electrodeunit Gasflowunit

Two parallel flat plate.
Gas input hole for fill up mixing gas (He and Ar).
Also, water cooling port. (IN and OUT)

Mass flow controller system

  1. Ar : Max. 5L/min
  2. He : Max. 5L/min
  3. Oxygen : Max. 200mL/min

Electrode spec.

  1. Electrode : Aluminum Up to W300xL50x H20mm Water Cooling type.
  2. Around electrode matirial:Quartzglass
Controlunit Powersupply

Touch panelandprogrammablecontroller (PLC)

1. Set process recip
Gas flow
RF power
oading speed (Conveyorspeedetc.)

2. Process monitor
Gas flow, RF power
Error

3 phase AC220V 25A
Safetymechanism
  1. This Equipment builtinsafetyfunction system.
  2. Builit in safetycoverforElectrode

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